Editorial for the Special Issue on Micro-Electro Discharge Machining: Principles, Recent Advancements and Applications
نویسندگان
چکیده
منابع مشابه
Micro-Electro-Discharge Machining Technologies for MEMS
Advances in micromachining techniques have led to the evolution of micro-electromechanical systems (MEMS). These techniques are typically based on semiconductor manufacturing processes, which offer various advantages such as batch manufacturing of miniaturized devices and monolithic integration of microelectronics with the devices. Surface micromachining has been used to construct complex micro...
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Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...
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Say Hwa Tan 1 ID , Heng-Dong Xi 2 and Weihua Li 3,* 1 Queensland Microand Nanotechnology Centre, Griffith University, 170 Kessels Road, Brisbane, QLD 4111, Australia; [email protected] 2 School of Aeronautics, Northwestern Polytechnical University, 127 West Youyi Rd., Xi’an 710072, China; [email protected] 3 School of Mechanical, Materials and Mechatronic Engineering, University o...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2021
ISSN: 2072-666X
DOI: 10.3390/mi12050554